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Gonzalo Rodriguez
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Gonzalo Murillo Rodriguez

Thanks for your contribution to our group!
Office: 276V IPST Building
Telephone: N/A
Fax: 404-894-9140
Email: gonzalo.murillo@mse.gatech.edu
Mailing Address: IPST Building 276V
Georgia Institute of Technology
500 10th Street N.W.
Atlanta, GA
Biosketch | Research Area | Publications | Highlights | Honors

Biosketch

  • PhD candidate at the Universidad Autónoma de Barcelona, from July 2007 to July 2011.
  • Master in Nano and Micro Electronics Engineering, Universidad Autónoma de Barcelona, from September 2007 to September of 2008.
  • Master in Electronics Engineering, Universidad de Granada, from December 2004 to December 2006
  • Bachelor in Physics, Universidad de Granada, from September 2001 to December 2004.

Research Area

  • Electromechanical modelization, design, fabrication and characterization of micro and nanomechanical resonators.
  • Compatibility of CMOS technology for the design and monolithic fabrication of micro and nano-electromechanic systems (MEMS, NEMS).
  • Development of microgenerators to harvest energy from environmental energy sources (with special focus on mechanical energy).
  • Energy scavenging to power micro and nanosystems (with special focus on piezoelectric and electrostatic transduction).
  • ZnO-nanowire based devices and piezo-phototronics effect.

Publications

  1. J. L. Lopez, J. Verd, J. Teva, G. Murillo, J. Giner, F. Torres, A. Uranga, G. Abadal, and N. Barniol, Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies, J. Micromech. Microeng., 2009, 19, 015002-015012
  1. G. Murillo, G. Abadal, F. Torres, J.L. Lopez, J. Giner, A. Uranga and N. Barniol, Harvester-on-Chip: Design of a proof of concept prototype, MicroElectronic Engineering, 2009, 86, 1183-1186
  1. JL. Lopez, J. Verd, A. Uranga, J. Giner, G. Murillo, F. Torres, G. Abadal and N. Barniol,  A CMOS-MEMS RF-Tunable Bandpass Filter Based on Two High-Q 22-MHz Polysilicon Clamped-Clamped Beam Resonators, IEEE Electron Device Letters, 2009, 30-7, 718-720.
  1. A. Uranga, J. Verd, JL. Lopez, J Teva, F. Torres, J. Giner, G. Murillo, G. Abadal and N. Barniol, Electrically enhanced read-out system for a high frequency CMOS-MEMS resonator, Electronic and Telecomunication Research Institute (ETRI) Journal, 2009,  31, 478-480.
  1. G. Murillo, Z. J. Davis, S. Keller, G. Abadal, J. Agusti, A. Cagliani, N. Noeth, A. Boisen and N. Barniol, Novel SU-8 based vacuum wafer-level packaging for MEMS devices, MicroElectronic Engineering, 2010, 87,1173-1176.
  1. J. Agustí, I. Pellejero, G. Abadal, G. Murillo, M.A. Urbiztondo, J. Sesé, M. Villarroya-Gaudó, M. Pina, J. Santamaría and N. Barniol Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensor, MicroElectronic Engineering, 2010, 87, 1207-1209.
  1. J.L. López, J. Giner, G. Murillo, F. Torres, E. Marigó, A. Uranga, G. Abadal and N. Barniol, Third-mode 48 MHz free–free beam resonator used as a RF balun, MicroElectronic Engineering, 2010, 87, 1256-1258.
  1. E. Marigó, J.L. López, G. Murillo, F. Torres, J. Giner, A. Uranga, G. Abadal, J. Esteve and N. Barniol,  Zero-level packaging of MEMS in standard CMOS technology, J. Micromech. Microeng., 2010, 20, 064009-064017.

Conference Proceedings

  1. G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, A. Uranga, N. Barniol, Free-free beam resonator with optimized nodal anchors integrated in a commercial CMOS technology, Eurosensors 2008, XXII, ISBN 978-3-00-025218-1 (2008), pp. 42
  2. J. Giner, C. Pey, H. Campanella, J. Esteve, A. Uranga, J. L. Lopez, G. Murillo, N. Barniol, G. Abadal, 2.25GHz FBAR <2mW Differential Oscillator, XXIII Conference on Design of Circuits and Integrated Systems. DCIS-2008, ISBN: 978-2-84813-124-5, pp. 54 (6 pages)
  3. J. L. Lopez, G. Murillo, J. Giner, A. Uranga, G. Abadal, N. Barniol, Fabrication of MEMS Resonators in the HF and VHF Range on a 0.18um CMOS Commercial Technology, XXIII Conference on Design of Circuits and Integrated Systems. DCIS-2008, ISBN: 978-2-84813-124-5, pp. (5 pages)
  4. G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, A. Uranga, N. Barniol, On the monolithic integration of CMOS-MEMS energy scavenger, XXIII Conference on Design of Circuits and Integrated Systems. DCIS-2008, ISBN: 978-2-84813-124-5, pp. 65 (6 pages)
  5. J.L. Lopez, F. Torres, G. Murillo, J. Giner, J. Teva, J. Verd, A. Uranga, G. Abadal and N. Barniol, Double-Ended Tuning Fork Resonator in 0.35um CMOS Technology for RF Applications, 2008,  PhD Research in Microelectronics and Electronics, PRIME 2008, ISBN: 978-1-4244-1983-8, pp. 89-92
  6. G. Murillo, J. Agusti, G. Abadal, F. Torres, J. Giner, E. Marigó, A. Uranga, N. Barniol, Integration of an improved Harvester-on-Chip core dice on commercial SOI-based MEMS technology, 2009, The 9th PowerMEMS2009 Workshop, ISBN: 0-9743611-5-1, pp. 233 (4 pages)  
  7. J. L. Lopez, J. Verd, J. Giner, A. Uranga, G. Murillo, E. Marigo, F. Torres, G. Abadal and N. Barniol, High Q CMOS_MEMS resonator and its application as a RF tunable band-pass filter, The 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers ’09, ISBN: 978-1-4244-4193-8, pp. 557-560.
  8. J. Giner, A. Uranga, J. Verd, G. Murillo E. Marigó, G. Abadal, F. Torres, and N. Barniol, Towards VHF Fully Integrated Microelectromechanical Filters, 10th International Symposium on RF MEMS and RF Microsystems. MEMSWAVE 2009, ISBN: , pp.
  9. J. L. Lopez, J. Verd, J. Giner, A. Uranga, G. Murillo, E. Marigo, F. Torres, G. Abadal and N. Barniol, High Q CMOS_MEMS resonator and its application as a RF tunable band-pass filter, The 15th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers ’09, ISBN: 978-1-4244-4193-8, pp. 557-560
  10. J. Giner, A. Uranga, J. Verd, G. Murillo E. Marigó, G. Abadal, F. Torres, and N. Barniol, Towards VHF Fully Integrated Microelectromechanical Filters, 10th International Symposium on RF MEMS and RF Microsystems. MEMSWAVE 2009, ISBN: , pp.  
  11. G. Murillo, J. Agusti, G. Abadal, F. Torres, J. Giner, E. Marigó, A. Uranga, N. Barniol, Microscale energy harvester driven by a built-in permanent magnet for self-powered nodes in appliance power cables, 2010, The 10th PowerMEMS2009 Workshop, ISBN: 978-9-07380-288-9, pp. 103 (4 pages)
  12. G. Murillo, G. Abadal, F. Torres, J. Ll. López, J. Giner, H. Campanella, A. Uranga, J. Esteve, N.Barniol, Novel designs of piezoelectric scavengers using FBAR technology, The 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS+microEMS2008 Workshop, ISBN: , pp.  
  13. G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, H. Campanella, A. Uranga, J. Esteve, N.Barniol, Harvester-on-Chip: Design and fabrication of a proof of concept prototype, The 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS+microEMS2008 Workshop, ISBN: , pp.

Attended Conferences

  1. Authors: G. Abadal, G. Murillo, J. Teva, F. Torres, J.L. Lòpez, A. Uranga, J. Esteve, F. Pérez-Murano, N. Barniol. Title: Micromechanical Hz to MHz frequency up-converter integrated in a standard CMOS-0.35µm technology for energy scavenging applications Conference: 33rd International Conference on Micro- and Nano-Engineering. MNE’07. Venue: Copenhagen, Denmark. Date: September 23-26, 2007
  2. Authors: J. Teva, G. Abadal, G. Murillo, J. L. Lopez, A. Uranga, J. Verd, F. Torres, J. Esteve, F. Pérez-Murano, N. Barniol. Title: Monolithic integration of MEMS-CMOS RF resonators in the VHF and UHF bands. A comparative study of 0.35-µm and 0.18-µm technologies Conference: 33rd International Conference on Micro- and Nano-Engineering. MNE’07. Venue: Copenhagen, Denmark. Date: September 23-26, 2007
  3. Authors: J.L. Lopez, F. Torres, G. Murillo, J. Giner, J. Teva, J. Verd, A. Uranga, G. Abadal and N. Barniol. Title: Double-Ended Tuning Fork Resonator in 0.35um CMOS Technology for RF Applications Conference: 2008 PhD Research in Microelectronics and Electronics. Venue: Istanbul, Turkey. Date: June 22-25, 2008
  4. Authors: G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, A. Uranga, N. Barniol. Title: Free-free beam resonator with optimized nodal anchors integrated in a commercial CMOS technology Conference: Eurosensors XXII. Venue: Dresden, Germany. Date: September 7-10, 2008
  5. Authors: G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, A. Uranga, N. Barniol. Title: Harvester-on-Chip: Design of a proof of concept prototype Conference: 34th International Conference on Micro- and Nano-Engineering. MNE’08. Venue: Athens, Greece. Date: September 15-18, 2008
  6. Authors: J. L. Lopez, G. Murillo, J. Giner, A. Uranga, F. Torres, G. Abadal, J. Esteve, F. Pérez-Murano, N. Barniol. Title: HF and VHF Nanoresonators Fabricated in a 0.18um Commercial CMOS Technology Conference: 34th International Conference on Micro- and Nano-Engineering. MNE’08. Venue: Athens, Greece. Date: September 15-18, 2008
  7. Authors: G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, A. Uranga, N. Barniol. Title: On the monolithic integration of CMOS-MEMS energy scavengers Conference: XXIII Conference on Design of Circuits and Integrated Systems. DCIS-2008. Venue: Grenoble, Francia. Date: November 12-14, 2008
  8. Authors: J. Giner, C. Pey, H. Campanella, J. Esteve, A. Uranga, J. L. Lopez, G. Murillo, N. Barniol, G. Abadal. Title: 2.25GHz FBAR <2mW Differential Oscillator Conference: XXIII Conference on Design of Circuits and Integrated Systems. DCIS-2008. Venue: Grenoble, Francia. Date: November 12-14, 2008
  9. Authors: J. L. Lopez, G. Murillo, J. Giner, A. Uranga, G. Abadal, N. Barniol. Title: Fabrication of MEMS Resonators in the HF and VHF Range on a 0.18um CMOS Commercial Technology Conference: XXIII Conference on Design of Circuits and Integrated Systems. DCIS-2008. Venue: Grenoble, Francia. Date: November 12-14, 2008
  10. Authors: G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, H. Campanella, A. Uranga, J. Esteve, N. Barniol. Title: Novel designs of piezoelectric scavengers using FBAR technology Conference: The 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS+microEMS2008 Workshop. Venue: Sendai, Japan. Date: November 10-12, 2008
  11. Authors: G. Murillo, G. Abadal, F. Torres, J. L. Lopez, J. Giner, H. Campanella, A. Uranga, J. Esteve, N. Barniol. Title: Harvester-on-Chip: Design and fabrication of a proof of concept prototype Conference: The 8th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS+microEMS2008 Workshop. Venue: Sendai, Japan. Date: November 10-12, 2008
  12. Authors: J. Giner, A. Uranga, J. Verd, G. Murillo E. Marigó, G. Abadal, F. Torres, and N. Barniol. Title: Towards VHF Fully Integrated Microelectromechanical Filters Conference: MEMSWave International Symposium. Venue: Trento, Italy. Date: July 6-8, 2009
  13. Authors: J. Giner, A. Uranga, F. Torres, E. Marigó, G. Murillo, G. Abadal and N. Barniol. Title: A Fully Integrated CMOS-MEMS UHF Ring Resonator Conference: 35th International Conference on Micro- and Nano-Engineering. MNE’09. Venue: Ghent, Belgium. Date: September 28 – October 1, 2009
  14. Authors: G. Murillo, Z. Davis, S. Keller, G. Abadal, J. Agustí, A. Cagliani, N. Noeth, A. Boisen, N. Barniol. Title: Novel SU-8 based Vacuum Wafer-Level Packaging for MEMS devices Conference: 35th International Conference on Micro- and Nano-Engineering. MNE’09. Venue: Ghent, Belgium. Date: September 28 – October 1, 2009
  15. Authors: J. Agustí, I. Pellejero, G. Abadal, G. Murillo, M.A. Urbiztondo, J. Sesé, M. Villarroya-Gaudó, M.P. Pina, Jesús Santamaría, N. Barniol Title: Mechanical properties characterization of silicalite-only cantilever based sensors for explosives early detection Conference: 35th International Conference on Micro- and Nano-Engineering. MNE’09. Venue: Ghent, Belgium. Date: September 28 – October 1, 2009
  16. Authors: J.L. Lopez, J. Giner, G. Murillo, F. Torres, E. Marigó, A. Uranga, G. Abadal, N. Barniol. Title: Third-Mode 48 MHz Free-Free Beam Resonator used as a RF balun Conference: 35th International Conference on Micro- and Nano-Engineering. MNE’09. Venue: Ghent, Belgium. Date: September 28 – October 1, 2009
  17. Authors: G. Murillo (INVITED). Title: Enegy harvesting and MEMS: Towards self-powered microsystems Conference: Third STIMESI Workshop on MEMS and Microsystems Research and Teaching. Venue: Prague, Czech Republic. Date: November 13, 2009
  18. Authors: G. Murillo, J. Agusti, G. Abadal, F. Torres, J. Giner, E. Marigó, A. Uranga, N. Barniol. Title: Integration of an improved Harvester-on-Chip core dice on commercial SOI-based MEMS technology Conference: The 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS2009 Workshop. Venue: Washington, USA. Date: December 1-4, 2009
  19. Authors: G. Murillo, J. Agusti, G. Abadal, F. Torres, J. Giner, E. Marigó, A. Uranga, N. Barniol. Title: Microscale energy harvester driven by a built-in permanent magnet for self-powered nodes in appliance power cables Conference: The 10th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications - PowerMEMS2010 Workshop. Venue: Leuven, Belgium. Date: November, 30 – December, 3, 2010

Research Highlights

  • Experience working in a cleanroom and growing  ZnO NWs in the laboratory.
  • Full-custom layout design and simulation of MEMS elements and CMOS circuits (CADENCE, COMSOL, COVENTOR, L-Edit, SPICE, etc).
  • Deep knowledge about programming languages (C, Fortran, Matlab, Assembler, etc) and microcontrollers, especially for instrumentation.

Honors & Awards

  • Scholarship from the Spanish Ministry of Education and Science to address his PhD at the Department of Electronics Engineering belonging to the Universidad Autónoma de Barcelona. July, 2007 – July 2011.
  • Grant from the Spanish Ministry of Science and Innovation to support a short stay in Nanotech the Denmark Technical University (DTU) in Copenhagen (Denmark). September, 2008 (12 weeks).
  • Grant from the Spanish Ministry of Science and Innovation to support a short stay in MINATEC in Grenoble (France). October, 2009 (12 weeks).
  • Grant from the Spanish Ministry of Science and Innovation support a short stay at Georgia Institute of Technology (GeorgiaTech) in Atlanta, GA (USA). August, 2010.  (18 weeks).